ProjectHIM – Forschungsgroßgerät Helium-Neon-Ionenmikroskop
Basic data
Acronym:
HIM
Title:
Forschungsgroßgerät Helium-Neon-Ionenmikroskop
Duration:
01/04/2016 to 31/12/2025
Abstract / short description:
A helium-neon-ion-microscope (HIM) uses a focused beam of helium or neon ions for the high resolution imaging of surfaces or for ultra-high resolution surface modification (ion beam induced deposition, ion milling down to the sub-10 nm regime). It thus offers a similar functionality as a scanning electron microscopy (SEM) or focused ion beam (FIB) machine, but considerably extends their abilities in several respects, expecially by offering even higher resolution. It thus offers broad opportunities in state-of-the-art imaging and fabrication.
Keywords:
Oberflächenanalyse
Nanostrukturierung
Physikalisches Ätzen
Heliumionen
Neonionen
Induzierte Abscheidung
Involved staff
Managers
Faculty of Science
University of Tübingen
University of Tübingen
Institute of Applied Physics (IAP)
Department of Physics, Faculty of Science
Department of Physics, Faculty of Science
Contact persons
Faculty of Science
University of Tübingen
University of Tübingen
Institute of Physical Chemistry (IPTC)
Department of Chemistry, Faculty of Science
Department of Chemistry, Faculty of Science
Faculty of Science
University of Tübingen
University of Tübingen
Institute of Physics (PIT)
Department of Physics, Faculty of Science
Department of Physics, Faculty of Science
Faculty of Science
University of Tübingen
University of Tübingen
Center for Applied Geoscience
Department of Geoscience, Faculty of Science
Department of Geoscience, Faculty of Science
Faculty of Science
University of Tübingen
University of Tübingen
Institute of Physics (PIT)
Department of Physics, Faculty of Science
Department of Physics, Faculty of Science
Faculty of Science
University of Tübingen
University of Tübingen
Institute of Physics (PIT)
Department of Physics, Faculty of Science
Department of Physics, Faculty of Science
Center for Light Matter Interaction, Sensors & Analytics (LISA+)
Central cross-faculty facilities
Central cross-faculty facilities
Faculty of Science
University of Tübingen
University of Tübingen
Institute of Physical Chemistry (IPTC)
Department of Chemistry, Faculty of Science
Department of Chemistry, Faculty of Science
Faculty of Science
University of Tübingen
University of Tübingen
Institute of Applied Physics (IAP)
Department of Physics, Faculty of Science
Department of Physics, Faculty of Science
Research training group: Intraoperative multi-sensor tissue identification in oncology
Research training groups
Research training groups
Faculty of Science
University of Tübingen
University of Tübingen
Institute of Applied Physics (IAP)
Department of Physics, Faculty of Science
Department of Physics, Faculty of Science
Center for Plant Molecular Biology (ZMBP)
Department of Biology, Faculty of Science
Department of Biology, Faculty of Science
Institute of Physical Chemistry (IPTC)
Department of Chemistry, Faculty of Science
Department of Chemistry, Faculty of Science
Local organizational units
Center for Light Matter Interaction, Sensors & Analytics (LISA+)
Central cross-faculty facilities
University of Tübingen
University of Tübingen
Funders
Bonn, Nordrhein-Westfalen, Germany