Project HIM – Forschungsgroßgerät Helium-Neon-Ionenmikroskop

Basic data

Acronym:
HIM
Title:
Forschungsgroßgerät Helium-Neon-Ionenmikroskop
Duration:
01/04/2016 to 31/12/2025
Abstract / short description:
A helium-neon-ion-microscope (HIM) uses a focused beam of helium or neon ions for the high resolution imaging of surfaces or for ultra-high resolution surface modification (ion beam induced deposition, ion milling down to the sub-10 nm regime). It thus offers a similar functionality as a scanning electron microscopy (SEM) or focused ion beam (FIB) machine, but considerably extends their abilities in several respects, expecially by offering even higher resolution. It thus offers broad opportunities in state-of-the-art imaging and fabrication.
Keywords:
Oberflächenanalyse
Nanostrukturierung
Physikalisches Ätzen
Heliumionen
Neonionen
Induzierte Abscheidung

Involved staff

Managers

Faculty of Science
University of Tübingen
Institute of Applied Physics (IAP)
Department of Physics, Faculty of Science

Contact persons

Faculty of Science
University of Tübingen
Institute of Physical Chemistry (IPTC)
Department of Chemistry, Faculty of Science
Faculty of Science
University of Tübingen
Institute of Physics (PIT)
Department of Physics, Faculty of Science
Faculty of Science
University of Tübingen
Center for Applied Geoscience
Department of Geoscience, Faculty of Science
Faculty of Science
University of Tübingen
Institute of Physics (PIT)
Department of Physics, Faculty of Science
Faculty of Science
University of Tübingen
Institute of Physics (PIT)
Department of Physics, Faculty of Science
Transregio 21 - Control of Quantum Correlations in Tailored Matter
Collaborative research centers and transregios
Center for Light Matter Interaction, Sensors & Analytics (LISA+)
Centers
Faculty of Science
University of Tübingen
Institute of Physical Chemistry (IPTC)
Department of Chemistry, Faculty of Science
Faculty of Science
University of Tübingen
Institute of Applied Physics (IAP)
Department of Physics, Faculty of Science
Faculty of Science
University of Tübingen
Institute of Applied Physics (IAP)
Department of Physics, Faculty of Science
Center for Plant Molecular Biology (ZMBP)
Department of Biology, Faculty of Science
Institute of Physical Chemistry (IPTC)
Department of Chemistry, Faculty of Science

Local organizational units

Center for Light Matter Interaction, Sensors & Analytics (LISA+)
Centers
University of Tübingen

Funders

Bonn, Nordrhein-Westfalen, Germany
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